Chemical & Biomolecular Engineering

Top 20 Doctoral Program—National Research Council

Location

Dept. of Chemical & Biomolecular Engineering
University of Houston
S222 Engineering Bldg 1,
Houston, TX 77204-4004
Phone: 713-743-4300
Campus Map

Faculty

Dr. Demetre J. Economou

Professor of Chemical and Biomolecular Engineering
Hugh Roy and Lillie Cranz Cullen Distinguished University Chair

Office Location: S239, Engineering Building 1

Tel: (713) 743-4320 | Fax: (713) 743-4323

Email: economou [at] uh [dot] edu

Education

  • Diploma, Chemical Engineering, National Technical University of Athens, Greece (1981)
  • M.S., Chemical Engineering, University of Illinois at Urbana-Champaign (1983)
  • Ph.D., Chemical Engineering, University of Illinois at Urbana-Champaign (1986)

Research Interests

Dr. Economou’s research focuses on plasma science and engineering as applied to etching and deposition of thin solid films for microelectronic device fabrication, nanotechnology, solar cells, and surface modification of materials. The projects described below are in collaboration with Prof. V. M. Donnelly.

Plasma Modeling and Simulation / Plasma Diagnostics

Plasma modeling and simulation are used to understand the influence of plasma reactor operating conditions on the energy distribution of electrons and ions, and in turn the interaction of these species with the wafer surface. Of interest are “particle” simulations (Particle-in-Cell, Monte Carlo) of the electron energy distribution function (EEDF) in the plasma, and the ion energy distribution function (IEDF) on the wafer surface. The “inverse” problem, that of specifying the operating conditions to achieve a desired EEDF and/or IEDF, is particularly challenging. Modeling and simulation are complemented with experimental measurements with emphasis on real-time, non-intrusive, spatially-resolved spectroscopic diagnostics, as well as electron and ion energy (also angular) distribution measurements.

Figure 1. Ion energy distributions on the wafer surface: comparison of measurements (left) with particle-in-cell simulations (right) under identical conditions (S. K. Nam, D. J. Economou, and V. M. Donnelly, Plasma Sources Sci. Technol., 16, 90-96, 2007).

Figure 2. Measured (using Trace Rare Gases Optical Emission Spectroscopy or TRG-OES) electron energy distribution functions (EEDF) in a parallel plate dual-frequency, capacitively-coupled CF4-O2 plasma reactor (Z. Chen, V. M. Donnelly, D. J. Economou, L. Chen, M. Funk, and R. Sundararajan, J. Vac. Sci. Technol. A., 27, 1159, 2009).

Nanopantography

This goal of this project is to fabricate orderly arrays of nanofeatures (few nm length scale) with pre-defined shapes and patterns over large areas (10s of cm2). These can find application in growth of orderly arrays of singe wall carbon nanotubes, nanoelectronics, and nanocatalysis. Simulations of ion extraction from a plasma and ion beam focusing on the wafer to form nanofeatures by etching or deposition are used to guide experimentation.

Figure 1. Side views: Depiction of nanopantography, a new method for massively parallel writing of nanopatterns. Top view: AFM and SEM images of Ni nanodots deposits by nanopantography. 45° View: SEM image of a cleaved edge of a lens array with ~100 nm long, 44 nm deep trenches etched at the center of each lens by nanopantography.

In nanopantography, standard photolithography, thin film deposition, and etching are used to fabricate arrays of ion-focusing micro-lenses (e.g., small round holes through a metal/insulator structure) on a substrate such as a silicon wafer. The substrate is then placed in a vacuum chamber, a broad area collimated beam of ions is directed at the substrate, and electric potentials are applied to the lens arrays such that the ions focus at the bottoms of the holes (e.g., on the wafer surface). When the wafer is tilted off normal (with respect to the ion beam axis), the focal points in each hole are laterally displaced, allowing the focused beamlets to be rastered across the hole bottoms. In this “nano-pantography” process, the desired pattern is replicated simultaneously in many closely spaced holes over an area limited only by the size of the broad-area ion beam. With the proper choice of ions and downstream gaseous ambient, the method can be used to deposit or etch materials. Data show that simultaneous impingement of an Ar+ beam and a Cl2 effusive beam on an array of 950 nm dia. lenses can be used to etch 10 nm dia. features into a Si substrate, a reduction of 95X. Simulations indicate that the focused “beamlet” diameters scale directly with lens diameter, thus a minimum feature size of ~1 nm should be possible with 90 nm dia. lenses. We expect nano-pantography to become a viable method for overcoming one of the main obstacles in practical nanoscale fabrication – rapid, large-scale fabrication of virtually any shape and material nanostructure. Unlike all other focused ion or electron beam writing techniques, this self aligned method is virtually unaffected by vibrations, thermal expansion, and other alignment problems that usually plague standard nanofabrication methods. This is because the ion focusing optics are built on the wafer. (please click here for PDF file on Nanopantography)

Microdischarge Plasma Reactors

Miniaturized (~ 100s of microns), high pressure (~ 1 atm) microdischarges are non-equilibrium plasmas with applications or potential applications in plasma display panels, chemical microreactors, sensors, VUV radiation sources, microelectromechanical systems (MEMS), and even plasma medicine. Spatially resolved (~5 microns resolution) optical emission spectroscopy measurements are performed with added traces of probe gases. Gas temperature profiles are determined using N2 rovibrational spectroscopy. Stark splitting of the hydrogen Balmer-β line is employed to investigate the electric field distribution in the cathode sheath region. Electron density is evaluated from the analysis of the spectral line broadening of Hβ emission. Excited species densities are measured with diode laser absorption spectroscopy. The effect of gas flow on gas temperature is also studied. These measurements combined with simulations of neutral gas and plasma flow provide valuable information regarding the operation of microplasmas, and guidelines on how to extend the useful range of operating pressure and power before the system turns into a (not as useful) high temperature arc. (please click here for PDF files on microdischarges I and microdischarges II)

Figure 1. Effect of gas flow on temperature profiles in a DC microplasma with 200 micron electrode spacing. The case of no flow is compared to the cases of 500 and 2000 sccm through the microplasma, for both argon and helium gases. The input power is 20 kW/cm3 in all cases.

Plasma Enhanced Chemical Vapor Deposition (PECVD) for Solar Cells

Amorphous hydrogenated silicon films with embedded nanocrystallites (nc-Si) hold great promise for solar cells, flexible electronics, displays, and other applications. A novel reactor is under development to grow nanocrystalline silicon (nc-Si) films by plasma enhanced chemical vapor deposition (PECVD). The layer-by-layer control of alternating deposition and crystallization reactions, along with the wide parameter space possible with this unique reactor, could produce nanocrystalline films with superior properties for solar cells and other applications. Surface and plasma diagnostics will monitor the nanocrystallization and gaseous product formation processes. Transmission electron microscopy and laser Raman scattering will yield the fraction of crystalline and amorphous material in the films, while spectroscopic ellipsometry and IR absorption will be used to further characterize the material. Optical emission spectroscopy and mass spectrometry will be employed to monitor gaseous reactants and byproducts. Coupled plasma and neutral gas flow simulations will aid the experimental design and interpretation of measurements. The combination of experiments and simulations will also help relate experimental conditions of high quality nc-Si film growth to spatiotemporal plasma structure and key species densities.

Atomic Layer Etching (ALET)

Etching with monolayer accuracy is a critical requirement for advancing nanoscience and nanotechnology. Current plasma etching techniques do not have the level of control or damage-free nature that is needed for patterning delicate sub-20 nm structures. In addition, ALET methods proposed thus far, based on pulsed gases with long reactant adsorption and purging steps, are very slow, even for etching extremely thin films. This project will develop the principles and techniques for a practical method of etching surfaces, one atomic layer at a time, using a combination of pulsed plasma and monoenergetic ion bombardment. With this novel methodology it should be possible to obtain ALET at a substantially higher rate (~30X), compared to other methods. Plasma experiments and simulations will be performed to understand the complex interaction between the pulsed plasma and the resulting ion energy distributions. Measurements of time-resolved ion bombardment energy and angular distributions will be coupled with etching experiments including the effect of noble gas ion mass, and reactant (Cl, Br, I) mass and electronegativity on sub-surface lattice damage and etching with monolayer accuracy. Plasma and surface diagnostics will be employed to measure product removal rate as a function of chemisorbed layer surface coverage and substrate damage. In-situ UHV-AFM/STM and XPS will provide valuable information on surface roughness and the spatial distribution of reactant in the modified surface layer.

Awards and Honors

  • 2011: W. T. Kittinger Teaching Excellence Award (Highest teaching honor of the College of Engineering)
  • 2010-present: Hugh Roy and Lillie Cranz Cullen Distinguished University Chair
  • 2009: Esther Farfel Award (Highest honor accorded to a UH faculty member)
  • 2008: Plasma Prize, Plasma Science and Technology Division, American Vacuum Society
  • 2008: Fluor Daniel Faculty Excellence Award, College of Engineering, University of Houston (Highest Award of the College of Engineering)
  • 2008: Senior Faculty Award for Excellence in Research and Scholarship, University of Houston (Highest research award of the University of Houston)
  • 2003: Fellow, American Vacuum Society
  • 2003: Outstanding Teaching Award, Cullen College of Engineering, University of Houston
  • 2002: Sigma Xi Faculty Research Award
  • Guest Editor: IEEE Trans. Plasma Science, Special Issues, August 1995, October 1999, August 2003 and October 2007
  • Guest Editor: Thin Solid Films, Special Issues, 2000, 2007
  • 1998-present: International Editorial Board, Materials Science in Semiconductor Processing
  • 1999: Senior Faculty Research Excellence Award, College of Engineering, University of Houston
  • 1996-2010: John and Rebecca Moores Professor
  • 1995: Excellence in Research and Scholarship Award, University of Houston
  • 1992: Best Young Author Paper Award of the Journal of Electrochemical Society
  • 1991: Young Faculty Research Excellence Award, Cullen College of Engineering, University of Houston

Journal Papers / Refereed Journal Publications

  1. Demetre J. Economou,

    "Pulsed Plasma Etching for Semiconductor Manufacturing", accepted in J. Phys. D: Appl. Phys [Invited Topical Review]

    , 2014
  2. Erdinc Karakas, Sanbir Kaler, Qiaowei Lou, Vincent. M. Donnelly, and Demetre J. Economou,

    “Absolute CO number densities by a self-actinometry method in a CH3F/O2 inductively-coupled plasmas,” J. Phys. D: Appl. Phys., 47, 085203

    , 2014
  3. Paola Diomede, Demetre J. Economou and Vincent M. Donnelly,

    "Instabilities in Capacitively Coupled Plasmas Driven by Asymmetric Rectangular Voltage Pulses", accepted in IEEE Trans. Plasma Sci

    , 2014
  4. Weiye Zhu, Shyam Sridhar, Lei Liu, Eduardo Hernandez, Vincent M. Donnelly, and Demetre J. Economou,

    "Photo-Assisted Etching of Silicon in Chlorine- and Bromine-Containing Plasmas", accepted in J. Appl. Phys.

    , 2014
  5. Demetre J. Economou,

    “Tailored ion energy distributions on plasma electrodes,” J. Vac. Sci. Technol. A, 31, 050823 [Invited paper commemorating the 60th Anniversary of the American Vacuum Society]

    , 2013
  6. E. Karakas, V. M. Donnelly, and D. J. Economou,

    “Langmuir Probe and Optical Emission Spectroscopy of CH3F/O2 Inductively Coupled Plasmas,” J. Appl. Phys., 113, 213301

    , 2013
  7. Erdinc Karakas, Vincent M. Donnelly and Demetre J. Economou,

    “Abrupt transitions in species number densities and plasma parameters in a CH3F/O2 inductively coupled plasma,” Appl. Phys. Lett., 102, 034107

    , 2013
  8. H. Shin, W. Zhou, L. Liu, S. Sridhar, V. M. Donnelly, D. J. Economou, C. Lenox, and T. Lii,

    “Selective Etching of TiN over TaN and vice-versa in Chlorine-Containing Plasmas,” J. Vac. Sci. Technol. A, 31, 031305

    , 2013
  9. Paola Diomede, Doosik Kim and Demetre J. Economou,

    “Particle-in-cell simulation of electron and ion energy distributions in dc/rf hybrid capacitively-coupled plasmas,” AIChE J., 59(9), 3214. Special Issue of AIChE Journal in memory of Neal Amundson

    , 2013
  10. Zhuo Chen, John A. Mucha, Vincent M. Donnelly, and Demetre J. Economou,

    “Plasma Enhanced Layer-by-Layer Deposition and Nano-crystallization of Hydrogenated Amorphous Silicon Films,” J. Vac. Sci. Technol. B, 31, 061209

    , 2013
  11. H. Shin, W. Zhu, D. J. Economou and V. M. Donnelly,

    “The Surprising Importance of Photo-Assisted Etching of Silicon in Chlorine-Containing Plasmas,” J. Vac. Sci. Technol. A, 30, 021306 [10 pages]

    , 2012
  12. H. Shin, W. Zhu, D. J. Economou and V. M. Donnelly,

    “Ion Energy Distributions, Electron Temperatures and Electron Densities in Ar, Kr and Xe Pulsed Discharges,” J. Vac. Sci. Technol. A, 30, 031304 [5 pages]

    , 2012
  13. Michael D. Logue, Hyungjoo Shin, Weiye Zhu, Lin Xu, Vincent M. Donnelly, Demetre J. Economou, and Mark J. Kushner,

    “Ion Energy Distributions in Inductively Coupled Plasmas Having a Biased Boundary Electrode,” Plasma Sources Sci. & Technol., 21, 065009

    , 2012
  14. P. Diomede, D. J. Economou and V. M. Donnelly,

    “Rapid Calculation of the Ion Energy Distribution on a Plasma Electrode,” accepted, J. Appl Phys.

    , 2012
  15. P. Diomede, S. Longo, D. J. Economou and M. Capitelli,

    “Hybrid Simulation of a DC-Enhanced Radio Frequency Capacitive Discharge in Hydrogen,” J. Phys. D: Appl. Phys., 45, 175204 [14 pages]

    , 2012
  16. H. Shin, W. Zhu, L. Xu, T. Ouk, D. J. Economou and V, M. Donnelly,

    “Control of ion energy distributions using a pulsed plasma with synchronous bias on a boundary electrode,” Plasma Sources Sci. Technol., 20, 055001 [9 pages]  

    , 2011
  17. P. Diomede, M. Nikolaou and D. J. Economou,

    “Voltage Waveform to Achieve a Desired Ion Energy Distribution on a Substrate in Contact with Plasma,” Plasma Sources Sci. Technol., 20, 045011 [9 pages]

    , 2011
  18. P. Diomede, V. M. Donnelly and D. J. Economou,

    “Particle-in-Cell Simulation of Ion Energy Distributions on an Electrode by Applying Tailored Bias Waveforms in the Afterglow of a Pulsed Plasma,” J. Appl. Phys., 109, 083302 [7 pages]

    , 2011
  19. Q. Li, Y.-K. Pu, M. A. Lieberman and D. J. Economou,

    “A Dynamic Model of Streamer Coupling for the Homogeneity of Glow-Like Dielectric Barrier Discharges at Near-Atmospheric Pressure,” accepted in Phys. Rev. E., 83, 046405 [7 pages]

    , 2011
  20. S. G. Belostotskiy, O. Tola, V. M. Donnelly, D. J. Economou, and N. Sadeghi,

    “Time and Space Resolved Measurements of Ar(1s5) Metastable Density in a Microplasma Using Diode Laser Absorption Spectroscopy,” J. Phys. D: Appl. Phys. 44, 145202

    , 2011
  21. G. Belostotskiy, O. Tola, V. M. Donnelly, D. J. Economou, and N. Sadeghi,

    “Gas Temperature and Electron Density Profiles in an Argon DC Microdischarge Measured by Optical Emission Spectroscopy,” J. Appl. Phys., 107, 053305, 7 pages

    , 2010
  22. D. J. Economou,

    “Modeling and Simulation of Fast Neutral Beam Sources for Materials Processing,” Plasma Processes and Polymers, 6, 308-319

    , 2009
  23. S. G. Belostotskiy, V. M. Donnelly, D. J. Economou, and N. Sadeghi,

    “Spatially Resolved Measurements of Argon Metastable (1s5) Density in a High Pressure Microdischarge Using Diode Laser Absorption Spectroscopy,” IEEE Trans. Plasma Sci., 37, 852-858

    , 2009
  24. Z. Chen, V. M. Donnelly, D. J. Economou, L. Chen, M. Funk, and R. Sundararajan,

    “Measurement of electron temperatures and electron energy distribution functions in dual frequency capacitively-coupled CF4/O2 plasmas using trace rare gases-optical emission spectroscopy (TRG-OES),” J. Vac. Sci. Technol. A., 27, 1159

    , 2009
  25. D. J. Economou,

    “Fast (10s -100s eV) Neutral Beams for Materials Processing,” J. Phys. D: Appl. Phys., 41, 024001 [11 pages]

    , 2008
  26. Lin Xu, Azeem Nasrullah, Zhiying Chen, Manish Jain, Demetre J. Economou, Paul Ruchhoeft, and Vincent M. Donnelly,

    “Etching of nanopatterns in silicon using nanopantography,” Appl Phys. Lett., 92, 013124

    , 2008
  27. Lin Xu, Lee Chen, Merritt Funk, Alok Ranjan, Mike Hummel, Ron Bravenec, Radha Sundararajan, Demetre J. Economou, and Vincent M. Donnelly,

    “Diagnostics of ballistic electrons in a dc/rf hybrid capacitively coupled discharge,” Appl. Phys. Lett., 93, 261502

    , 2008
  28. Sergey Belostotskiy, Rahul Khandelwal, Qiang Wang, Vincent M. Donnelly, Demetre J. Economou, and Nader Sadeghi,

    “Measurement of Electron Temperature and Density in an Argon Microdischarge by Laser Thomson Scattering,” Appl. Phys. Lett., 92, 221507

    , 2008
  29. Sergey Belostotskiy, Vincent M. Donnelly, and Demetre J. Economou,

    “Influence of Gas Heating on High Pressure DC Microdischarge I-V Characteristics,” Plasma Sources Sci. Technol., 17, 045018

    , 2008
  30. A. Ranjan, C. Helmbrecht, V. M. Donnelly, D. J. Economou, and G. Franz,

    “Effect of Surface Roughness on the Energy Distribution of Fast Neutrals and Residual Ions Extracted from a Neutral Beam Source,” J. Vac. Sci. Technol. B., 25, 258-263

    , 2007
  31. D. Economou,

    “Fundamentals and Applications of Ion-Ion Plasmas,” Appl. Surf. Science, 253, 6672-6680

    , 2007
  32. L. Xu, N. Sadeghi, V. M. Donnelly, and D. J. Economou,

    “Nickel Atom and Ion Density in an Inductively Coupled Plasma with an Internal Coil,” J. Appl. Phys., 101, 013304

    , 2007
  33. Q. Wang, F. Doll, V. M. Donnelly, D. J. Economou, N. Sadeghi, and G. Franz,

    “Experimental and Theoretical Study of the Effect of Gas Flow on Gas Temperature in an Atmospheric Pressure Microplasma,” J. Phys. D: Appl. Phys., 40, 4202-4211

    , 2007
  34. S. Belostotskyi, Q. Wang, V. M. Donnelly, D. J. Economou, and N. Sadeghi,

    “Three Dimensional Gas Temperature Measurements in Atmospheric Pressure Microdischarges Using Raman Scattering,” Appl. Phys. Lett., 89, 251503

    , 2007
  35. S. K. Nam, D. J. Economou, and V. M. Donnelly,

    “Particle-in-Cell Simulation of Ion Beam Extraction from a Pulsed Plasma Through a Grid,” Plasma Sources Sci. Technol., 16, 90-96

    , 2007
  36. Sang Ki Nam, Demetre J. Economou and Vincent M. Donnelly,

    “Generation of Fast Neutral Beams by Ion Neutralization in High Aspect Ratio Holes: A Particle-in-Cell Simulation Study,” IEEE Trans. Plasma Sci., 35, 1370-1378

    , 2007
  37. A. Ranjan, V. M. Donnelly, and D. J. Economou,

    “Energy Distribution and Flux of fast Neutrals and Residual Ions Extracted from a neutral beam Source,” J. Vac Sci. Technol. A, 24, 1839-1846

    , 2006
  38. O Polomarov, C. Theodosiou, I. Kaganovich, B. Ramamurthi, and D. J. Economou,

    “Self-Consistent Modeling of Non-Local Inductively Coupled Plasmas,” IEEE Trans. Plasma Science, 34, 767-785

    , 2006
  39. Q. Wang, D. J. Economou, and V. M. Donnelly,

    “Simulation of Direct Current Micro-Plasma Discharge in Helium at Atmospheric Pressure,” J. Appl. Phys., 100, 023301

    , 2006
  40. S. K. Nam, D. J. Economou, and V. M. Donnelly,

    “Particle-in-Cell Simulation of Beam Extraction Through a Hole in Contact with Plasma,” J. Phys. D: Appl. Phys., 39, 3994-4000

    , 2006
  41. L. Xu, D. J. Economou, V. M. Donnelly and P. Ruchhoeft,

    “Extraction of a Nearly Monoenergetic Ion Beam from a Pulsed Plasma,” Appl. Phys. Lett., 87, 041502

    , 2005
  42. L. Xu, S. C. Vemula, M. Jain, S. K. Nam, V. M. Donnelly, D. J. Economou, and P. Ruchhoeft,

    “Nanopantography: A New Method for Massively Parallel Nanopatterning over Large Areas,” Nano Lett., 5, 2563-2568

    , 2005
  43. O Polomarov, C. Theodosiou, I. Kaganovich, B. Ramamurthi, and D. J. Economou,

    “Effectiveness of electron-cyclotron and transmission resonance heating in inductively coupled plasmas,” Phys. Plasmas, 12, 104505

    , 2005
  44. Q. Wang, I. Koleva, V. M. Donnelly, and D. J. Economou,

    “Spatially Resolved Diagnostics of a Direct Current Atmospheric Pressure Helium Micro-plasma,” J. Phys. D: Appl. Phys., 38, 1690-1697

    , 2005
  45. S. Nam, V. M. Donnelly and D. J. Economou,

    “Particle-in-cell simulation of ion flow through a hole in contact with plasma,” IEEE Trans. Plasma Sci., 33, 232

    , 2005
  46. S.G. Belostotsky, D.J. Economou, D.V. Lopaev, and T.V. Rakhimova,

    “Negative Ion Destruction by O(3P) Atoms and O2(a1∆g) Molecules in an Oxygen Plasma,” Plasma Sources Science and Technology, 14, 532-542

    , 2005
  47. D. Economou,

    “Electronegative Plasma Reactor Engineering,” in Gaseous Dielectrics X, edited by L. Christophorou, J. Olthoff, and P. Vassiliou, p. 157-166, Springer

    , 2004
  48. D. Kim and D. J. Economou,

    “Simulation of a Two-Dimensional Sheath over a Flat Insulator-Conductor Interface on a RF Biased Electrode in a High Density Plasma,” J. Appl. Phys., 95, 3311-3318

    , 2004
  49. S. K. Nam and D. J. Economou,

    “Two-Dimensional Simulation of a Miniaturized Inductively Coupled Plasma,” J. Appl. Phys., 95, 2272-2277

    , 2004
  50. B. Ramamurthi, D. J. Economou, and I. Kaganovich,

    “Effect of Electron Energy Distribution Function on Power Deposition and Plasma Density in an Inductively Coupled Discharge at Very Low Pressures,” Plasma Sources Sci. Technol., 12, 302-312

    , 2003
  51. B. Ramamurthi, D. J. Economou, and I. Kaganovich,

    “Effect of non-local electron conductivity on power absorption and plasma density profiles in low pressure inductively coupled discharges,” Plasma Sources Sci. Technol., 12, 170

    , 2003
  52. D. Kim and D. J. Economou,

    “Plasma Molding over Deep Trenches and the Resulting Ion and Energetic Neutral Distributions,” J. Vac. Sci. Technol. B, 21, 1248-1253

    , 2003
  53. D. Kim and D. J. Economou,

    “Simulation of Plasma Molding over a Ring on a Flat Surface,” J. Appl. Phys., 94, 3740-3747

    , 2003
  54. D. Kim and D. J. Economou,

    “Simulation of a Two-Dimensional Sheath over a Flat Wall with an Insulator-Conductor Interface Exposed to a High Density Plasma,” J. Appl. Phys., 94, 2852-2857

    , 2003
  55. D. Kim, D. J. Economou, J. R. Woodworth, P. A. Miller, R. J. Shul, I. C. Abraham, B. P. Aragon, and T. W. Hamilton,

    “Plasma Molding Over Surface Topography: Simulation and Measurement of Ion Fluxes, Energies and Angular Distributions Over Trenches in RF High Density Plasmas,” IEEE Trans. Plasma Sci., 31, 691-702

    , 2003
  56. J. R. Woodworth, P. A. Miller, R. J. Shul, I. C. Abraham, B. P. Aragon, T. W. Hamilton, C. G. Willison, D. Kim, and D. J. Economou,

    “An experimental and theoretical study of ion distributions near 300-μm-tall steps on rf-biased wafers in high density plasmas,” J. Vac. Sci. Technol. A, 21, 147-155

    , 2003
  57. B. Ramamurthi and D. J. Economou,

    “Pulsed Power Plasma Reactors: Two Dimensional Electropositive Discharge Simulation in a GEC Reference Cell,” Plasma Sources Science and Technology, 11, 324-332

    , 2002
  58. B. Ramamurthi and D. J. Economou,

    “Metastable argon density evolution in a pulsed ICP discharge,” IEEE Trans. Plasma Sci., 30(1), 152

    , 2002
  59. B. Ramamurthi and D. J. Economou,

    “Two-Dimensional Pulsed-Plasma Simulation of a Chlorine Discharge,” J. Vac. Sci. Technol. A, 20, 467-478

    , 2002
  60. C.-K. Kim and D. J. Economou,

    “Plasma Molding over Surface Topography: Energy and Angular Distributions of Ions Extracted out of Large Holes,” J. Appl. Phys., 91, 2594-2603

    , 2002
  61. D. Kim and D. J. Economou,

    “Plasma Molding over Surface Topography: Simulation of Ion Flow and Energy and Angular Distributions over Steps in RF High Density Plasmas,” IEEE Trans. Plasma Sci., 30(5), 2048-2058

    , 2002
  62. D. Kim and D. J. Economou,

    “Energy and angular distributions of ions and neutrals extracted from a slot in contact with a high density plasma,” IEEE Trans. Plasma Sci., 30(1), 126

    , 2002
  63. Doosik Kim and Demetre J. Economou,

    “Plasma Molding over Surface Topography,” JSME International Journal, Series B, 45(1), 117-122

    , 2002
  64. T. Panagopoulos, V. Midha, D. Kim and D. J. Economou,

    “Three-Dimensional Simulation of Inductively Coupled Plasma Reactors,” J. Appl. Phys., 91, 2687-2696

    , 2002
  65. V. Midha, B. Ramamurthi, and D. J. Economou,

    “Time Evolution of an Ion-Ion Plasma after the Application of a Direct Current Bias,” J. Appl. Phys., 91, 6282-6287

    , 2002
  66. B. Ramamurthi and D. J. Economou,

    “Two-dimensional simulation of a pulsed electronegative discharge,” Journal de Physique (IV), 11(Pr3), 163-169

    , 2001
  67. I. D. Kaganovich, B. N. Ramamurthi, and D. J. Economou,

    “Spatiotemporal Dynamics of Charged Species in the Afterglow of Plasmas Containing Negative Ions,” Phys. Rev. E, 64, 036402

    , 2001
  68. S. K. Kanakasabapathy, L. J. Overzet, V. Midha, and D. J. Economou,

    “Alternating Fluxes of Positive and Negative Ions from an Ion-Ion Plasma,” Appl. Phys. Lett., 78, 22-24

    , 2001
  69. S. Panda, D. J. Economou, and L. Chen,

    “Anisotropic Etching of Polymer Thin Films by High Energy (100s of eV) Oxygen Atom Neutral Beams,” J. Vac. Sci. Technol., A19, 398-404

    , 2001
  70. V. Midha and D. J. Economou,

    “Dynamics of an Ion-Ion Plasma under Radio Frequency Bias,” J. Appl. Phys., 90, 1102

    , 2001
  71. D. J. Economou,

    “Modeling and Simulation of Plasma Etching Reactors for Microelectronics,” Thin Solid Films, 365, 348-367

    , 2000
  72. I. Kaganovich, D. J. Economou, B. N. Ramamurthi, and V. Midha,

    “Negative Ion Density Fronts During Ignition and Extinction of Plasmas in Electronegative Gases,” Phys. Rev. Lett., 84, 1918-1921

    , 2000
  73. I. Kaganovich, D.B. Ramamurthi, and D. J. Economou,

    “Self-Trapping of Negative Ions due to Electron Detachment in the Afterglow of Electronegative Gas Plasmas,” Appl. Phys. Lett., 76, 2844-2846

    , 2000
  74. J. Feldsien, D. Kim, and D. J. Economou,

    “SiO2 Etching in Inductively Coupled Plasmas: Surface Chemistry and Two-Dimensional Simulations,” Thin Solid Films, 374, 311-325

    , 2000
  75. S. Panda, D. J. Economou, and M. Meyyappan,

    “Effect of Metastable Oxygen Molecules in High-Density Power Modulated Oxygen Discharges,” J. Appl Phys., 87, 8323-8333

    , 2000
  76. V. Midha and D. J. Economou,

    “Spatiotemporal Evolution of a Pulsed Chlorine Discharge,” Plasma Sources Sci. Technol., 9, 256-269

    , 2000
  77. C.-K. Kim, N. A. Kubota, and D. J. Economou,

    “Molecular Dynamics Simulation of Silicon Surface Smoothing by Low-Energy Argon Cluster Impact,” J. Appl. Phys., 86(12), 6758-6762

    , 1999
  78. D. J. Economou,

    “Plasma Reactor Engineering,” in Advances in Electrochemistry and Electrochemical Engineering, Vol. 6, p. 237, edited by R. C. Alkire and D. M. Kolb, Wiley-VCH

    , 1999
  79. D. J. Economou, N. A. Kubota, and R. S. Wise,

    “Plasmoid Formation and Multiple Steady States in a Low Pressure Inductively Coupled Electronegative Plasmas,” IEEE Trans. Plasma Sci., 27, 60

    , 1999
  80. N. A. Kubota, and D. J. Economou,

    “A Molecular Dynamics Simulation of Ultrathin Oxide Films on Silicon: Growth by Thermal O Atoms and Sputtering by 100 eV Ar+ Ions,” IEEE Trans. Plasma Sci., 27(5), 1416-1425

    , 1999
  81. N. A. Kubota, and D. J. Economou,

    “Molecular Dynamics Simulations of Ion-Induced Rearrangements of Ultrathin Oxide Films on Silicon,” IEEE Trans. Plasma Sci., 27, 106

    , 1999
  82. N. Gupta, V. Midha, V. Balakotaiah, and D. J. Economou,

    “Bifurcation Analysis of Thermal Runaway in Microwave Heating of Ceramics,” J. Electrochem. Soc., 146(2), 4659-4665

    , 1999
  83. S. Panda, J. Kim, B. H. Weiller, D. J. Economou, and D. M. Hoffman,

    “Low Temperature Chemical Vapor Deposition of Titanium Nitride Films from Tetrakis (ethylmethylamido) titanium and ammonia,” Thin Solid Films, 357, 125-131

    , 1999
  84. S.-K. Nam, C. B. Shin, and D. J. Economou,

    “Two-dimensional plasma reactor simulation with self-consistent coupling of gas flow with plasma transport,” Materials Science in Semiconductor Processing, 2, 271-279

    , 1999
  85. T. Panagopoulos and D. J. Economou,

    “Plasma Sheath Model and Ion Energy Distribution for All Radio Frequencies,” J. Appl. Phys., 85, 3435

    , 1999
  86. D. J. Economou, J. Feldsien, and R. S. Wise,

    “Transport and Reaction in Inductively Coupled Plasmas for Microelectronics,” in Electron Kinetics and Applications of Glow Discharges, edited by U. Kortshagen and L. D. Tsendin, NATO Advanced Research Workshop, Plenum

    , 1998
  87. D. J. Economou, T. L. Panagopoulos, and M. Meyyappan,

    “Examining Scale-Up and Computer Simulation in Tool Design for 300-mm wafer Processing,” Micro, 16(7), 101-113

    , 1998
  88. D. P. Lymberopoulos, V. I. Kolobov, and D. J. Economou,

    “Fluid Simulation of a Pulsed-Power Inductively Coupled Argon Plasma,” J. Vac. Sci. Technol. A, 16, 564-571

    , 1998
  89. N. A. Kubota, D. J. Economou, and S. Plimpton,

    “Molecular Dynamics Simulations of Low Energy (25-200 eV) Argon Ion Interactions with Silicon Surfaces: Sputter Yields and Product Formation Pathways,” J. Appl. Phys., 83, 4055-4063

    , 1998
  90. V. I. Kolobov and D. J. Economou,

    “Ion-Ion Plasmas in Weakly Collisional Discharges in Electronegative Gases,” Appl. Phys. Lett., 72, 656-658

    , 1998
  91. V. Midha and D. J. Economou,

    “A Two-Dimensional Model of Chemical Vapor Infiltration with Radio Frequency Heating II: Strategies to Achieve Complete Densification,” J. Electrochem. Soc., 145, 3569-3580

    , 1998
  92. J. Johannes, T. Bartel, G. A. Hebner, J. Woodworth, and D. J. Economou,

    “Direct Simulation Monte Carlo of Inductively Coupled Plasma and Comparison with Experiments,” J. Electrochem Soc., 144, 2448-2455

    , 1997
  93. V. I. Kolobov and D. J. Economou,

    “Anomalous Skin Effect in Gas Discharge Plasmas,” Plasma Sources Sci. & Technol., 6, R1-R17

    , 1997
  94. V. I. Kolobov, D. P. Lymberopoulos, and D. J. Economou,

    “Electron Kinetics and Non-Joule Heating in Near Collisionless Inductively Coupled Plasmas,” Physical Review E, 55, 3408

    , 1997
  95. V. Midha and D. J. Economou,

    “A Two-Dimensional Model of Chemical Vapor Infiltration with Radio Frequency Heating,” J. Electrochem. Soc., 144, 4062-4071

    , 1997
  96. D. J. Economou,

    “The Chemistry of Plasma Etching,” in The Chemistry of Electronic Materials, H. B. Pogge, editor, pp. 251-322, Marcel Dekker, Inc.

    , 1996
  97. D. J. Economou and T. J. Bartel,

    “Direct Simulation Monte Carlo (DSMC) of Rarefied Gas Flow During Etching of Large Diameter (300 mm) Wafers,” IEEE Trans. Plasma Sci., 24, 131

    , 1996
  98. D. Lymberopoulos, R. Wise, D. J. Economou, and T. Bartel,

    “Ion Density and Temperature Distribution in an Inductively Coupled High Plasma Density Reactor,” IEEE Trans. Plasma Sci., 24, 129

    , 1996
  99. D. M. Hoffman, S. P. Rangarajan, S. D. Athavale, D. J. Economou, J.-R. Liu, Z. Zheng, and W.-K. Chu,

    “Chemical vapor deposition of aluminum and gallium nitride thin films from metalorganic precursors,” J. Vac. Sci. Technol. A, 14, 306-311

    , 1996
  100. J. Johannes, T. Bartel, D. Economou, D. Lymberopoulos and R. Wise,

    “Simulation Images from a Low Pressure Chlorine Plasma Reactor Using the Direct Simulation Monte Carlo Method,” IEEE Trans. Plasma Sci., 24, 127

    , 1996
  101. R. Wise, D. Lymberopoulos and D. J. Economou,

    “Rapid Two-Dimensional Self-Consistent Simulation of Inductively Coupled Plasma and Comparison with Experiments,” Appl. Phys. Lett., 68, 2499

    , 1996
  102. S. Athavale and D. J. Economou,

    “Realization of Atomic Layer Etching (ALET) of Silicon,” J. Vac. Sci. Technol. B, 14, 3702

    , 1996
  103. D. J. Economou, T. J. Bartel, R. S. Wise and D. P. Lymberopoulos,

    “Two-Dimensional Direct Simulation Monte Carlo (DSMC) of Reactive Ion and Neutral Flow in a High Density Plasma Reactor,” IEEE Trans. Plasma Sci., 23, 581-590

    , 1995
  104. D. M. Hoffman, S. P. Rangarajan, S. D. Athavale, D. J. Economou, J.-R. Liu, Z. Zheng, and W.-K. Chu,

    “Plasma enhanced chemical vapor deposition of silicon, germanium and tin nitride thin films from metal-organic precursors,” J. Vac. Sci. Technol. A, 13, 820-825

    , 1995
  105. D. P. Lymberopoulos and D. J. Economou,

    “Two-Dimensional Self-Consistent Radio Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference (GEC) Reference Cell,” Journal of Research of the National Institute of Standards and Technology, 100, 473-494

    , 1995
  106. D. P. Lymberopoulos and D. J. Economou,

    “Two-Dimensional Simulation of Polysilicon Etching with Chlorine in a High Density Plasma Reactor,” IEEE Trans. Plasma Sci., 23, 573-580

    , 1995
  107. D. P. Lymberopoulos and D. J. Economou,

    “Spatiotemporal Electron Dynamics in Radio Frequency Glow Discharges,” J. Phys. D: Appl. Phys., 28, 727-737

    , 1995
  108. P. Jiang, D. J. Economou, and C. B. Shin,

    “Effect of Power Modulation on Radical Concentration and Uniformity in a Single-Wafer Plasma Reactor,” Plasma Chemistry Plasma Process., 15, 383-408

    , 1995
  109. R. S. Wise, D. P. Lymberopoulos and D. J. Economou,

    “A Two-Region Model of a Radio Frequency Low-Pressure High-Density Glow Discharge,” Plasma Sources Sci. Technol., 4, 317-331

    , 1995
  110. S. D. Athavale and D. J. Economou,

    “Molecular Dynamics Simulation of Atomic Layer Etching (ALET) of Silicon,” J. Vac. Sci. Technol. A, 13, 966-971

    , 1995
  111. D. M. Hoffman, S. P. Rangarajan, S. D. Athavale, D. J. Economou, J.-R. Liu, Z. Zheng, and W.-K. Chu,

    “Plasma Enhanced Metalorganic Chemical Vapor Deposition of Germanium Nitride Thin Films,” Mater. Res. Soc. Symp. Proc., 335, 3-7

    , 1994
  112. D. M. Hoffman, S. P. Rangarajan, S. D. Athavale, S. C. Deshmukh, D. J. Economou, J.-R. Liu, Z. Zheng, and W.-K. Chu,

    “Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Films from Metalorganic Precursors,” J. Mater. Res., 12,  3019-3021

    , 1994
  113. D. P. Lymberopoulos and D. J. Economou,

    “Modeling and Simulation of Glow Discharge Plasma Reactors,” J. Vac. Sci. Technol. A, 12, 1229-1236

    , 1994
  114. N. L. Bassett and D. J. Economou,

    “Effect of Cl2 Additions to an Argon Glow Discharge,” J. Appl. Phys., 75, 1931-1939

    , 1994
  115. C. R. Koemtzopoulos, D. J. Economou, and R. Pollard,

    “Hydrogen Dissociation in a Microwave Discharge for Diamond Deposition,” Diamond and Related Materials, 2, 25-35

    , 1993
  116. D. P. Lymberopoulos and D. J. Economou,

    “Fluid Simulations of Glow Discharges: Effect of Metastable Atoms in Ar,” J. Appl. Phys., 73, 3668-3679

    , 1993
  117. D. P. Lymberopoulos and D. J. Economou,

    “Fluid Simulations of Radio Frequency Glow Discharges: Two-Dimensional Argon Discharge Including Metastables,” Appl. Phys. Lett., 63, 2478-2480

    , 1993
  118. E. S. Aydil and D. J. Economou,

    “Modeling of Plasma Etching Reactors Including Wafer Heating Effects,” J. Electrochem. Soc., 140, 1471-1481

    , 1993
  119. J. Morrel, D. J. Economou, and N. Amundson,

    “Chemical Vapor Infiltration of SiC with Volume Heating,” J. Mater. Res., 8, 1057-1067

    , 1993
  120. P. Jiang and D. J. Economou,

    “Temporal Evolution of the Electron Energy Distribution Function in Oxygen and Chlorine Gases under DC and AC Fields,” J. Appl. Phys., 73, 8151-8160

    , 1993
  121. Q. Xiong, Y. Y. Xue, P. Hor, C. W. Chu, M. Davis, J. Wolfe, S. Deshmukh, and D. Economou,

    “Effect of pressure on the critical current density of YBa2Cu3O7-δ thin films,” Physica C205, 307

    , 1993
  122. S. Deshmukh and D. J. Economou,

    “Remote Plasma Etching Reactors: Modeling and Experiment,” J. Vac. Sci. Technol. B, 11, 206-215

    , 1993
  123. E. Aydil and D. Economou,

    “Combined Theoretical and Experimental Investigations of Chlorine RF Glow Discharges. I: Theoretical,” J. Electrochem. Soc., 139, 1396-1406

    , 1992
  124. E. Aydil and D. Economou,

    “Combined Theoretical and Experimental Investigations of Chlorine RF Glow Discharges. II: Experimental,” J. Electrochem. Soc., 139, 1406-1412

    , 1992
  125. F. Fong, S. Deshmukh, M. Davis, D. Stumbo, J. Wolfe, and D. Economou,

    “Resolution Limits of Ion Milling for Fabricating Y1Ba2Cu3Ox Nanostructures,” J. Appl. Phys., 71, 2461

    , 1992
  126. J. Morrel, D. Economou and N. Amundson,

    “A Mathematical Model for Chemical Vapor Infiltration with Volume Heating,” J. Electrochem. Soc., 139, 328-336

    , 1992
  127. J. Morrel, D. J. Economou, and N. Amundson,

    “Pulsed-Power Volume-Heating Chemical Vapor Infiltration,” J. Mater. Res., 7, 2447-2457

    , 1992
  128. S. Deshmukh and D. J. Economou,

    “Factors Affecting the Cl Atom Density in a Chlorine Discharge,” J. Appl. Phys., 72, 4597-4607

    , 1992
  129. C. B. Shin and D. Economou,

    “Forced and Natural Convection Effects on the Shape Evolution of Cavities during Wet Chemical Etching,” J. Electrochem. Soc., 138, 527-538

    , 1991
  130. D. Economou, E. Aydil, and G. Barna,

    “In Situ Monitoring of Etching Uniformity in Plasma Reactors,” Solid State Technology, 34, 107-111

    , 1991
  131. Eray Aydil and D. Economou,

    “Multiple Steady-States in a Radio Frequency Chlorine Glow Discharge,” J. Appl. Phys., 69, 109-114

    , 1991
  132. M. Davis, J. Wosik, K. Foster, S. Deshmukh, H. Rampersad, S. Shah, P. Siesmen, D. Economou, and J. Wolfe,

    “Deposition of High Quality Y1Ba2Cu3Ox Thin Films over Large Areas by Pulsed Laser Ablation with Substrate Scanning,” J. Appl. Phys., 69, 7182-7188

    , 1991
  133. Ping Jiang and D. Economou,

    “Wet Etching of GaAs Using a Novel Rotating Cell Reactor,” J. Electrochem. Soc., 138, L28-L29

    , 1991
  134. S.-K. Park and D. Economou,

    “A Mathematical Model for Etching of Silicon Using Tetrafluoromethane in a Radial Flow Plasma Reactor,” J. Electrochem. Soc., 138, 1499-1508

    , 1991
  135. Y. J. Zhao, W. K. Chu, D. K. Christen, E. C. Jones, M. F. Davis, J. C. Wolfe, S. C. Deshmukh, and D. J. Economou,

    “Linewidth Dependence of Critical Current Density in Y1Ba2Cu3Ox Thin Film Microbridges,” Appl. Phys. Lett., 59, 1129-1131

    , 1991
  136. Y. J. Zhao, W. K. Chu, M. F. Davis, J. C. Wolfe, S. C. Deshmukh, D. J. Economou, and A. McGuire,

    “Radiation Damages and Flux Pinning in YBCO Thin Films,” Physica C, 184, 144-148

    , 1991
  137. C. B. Shin and D. Economou,

    “Mass Transfer by Natural and Forced Convection in Open Cavities,” Int. J. Heat Mass Transfer, 33, 2191-2205

    , 1990
  138. S.-K. Park and D. Economou,

    “Numerical Simulation of a Single-Wafer Isothermal Plasma Etching Reactor,” J. Electrochem. Soc., 137, 2624-2634

    , 1990
  139. S.-K. Park and D. Economou,

    “Analysis of a Pulsed-Plasma Chemical Vapor Deposition Reactor with Recycle,” J. Electrochem. Soc., 137, 2103-2116

    , 1990
  140. S.-K. Park and D. Economou,

    “Parametric Studies of a Radio Frequency Glow Discharge Using a Continuum Model,” J. Appl. Phys., 68, 4888-4890

    , 1990
  141. S.-K. Park and D. Economou,

    “Analysis of Low Pressure RF Glow Discharges Using a Continuum Model,” J. Appl. Phys., 68, 3904-3915

    , 1990
  142. C. B. Shin and D. Economou,

    “Effect of Transport and Reaction on the Shape Evolution of Cavities during Wet Chemical Etching,” J. Electrochem. Soc., 136, 1997-2004

    , 1989
  143. D. Economou, S.-K. Park, and G. Williams,

    “Uniformity of Etching in Parallel Plate Plasma Reactors,” J. Electrochem. Soc., 136, 188-198

    , 1989
  144. S.-K. Park and D. Economou,

    “A Mathematical Model for a Plasma-Assisted Downstream Etching Reactor,” J. Appl. Phys., 66, 3256-3267

    , 1989
  145. D. Economou and R. Alkire,

    “A Mathematical Model for a Parallel Plate Plasma Etching Reactor,” J. Electrochem. Soc., 135, 2786-2794

    , 1988
  146. D. Economou and R. Alkire,

    “Effect of Potential Field on Ion Deflection and Shape Evolution of Trenches during Plasma-Assisted Etching,” J. Electrochem. Soc., 135, 941-949

    , 1988
  147. D. Economou, D. Evans, and R. Alkire,

    “A Time-Average Model of the RF Plasma Sheath,” J. Electrochem. Soc., 135, 756-763

    , 1988
  148. D. Economou and R. Alkire,

    “Two-Phase Mass Transfer in Channel Electrolyzers with Gas-Liquid Flow,” J. Electrochem. Soc., 132, 601-608

    , 1985
  149. R. Alkire and D. Economou,

    “Transient Behavior during Film Removal in Diffusion-Controlled Plasma Etching,” J. Electrochem. Soc., 132, 648-656

    , 1985
  150. C. Philippopoulos, D. Economou, C. Economou, and J. Marangozis,

    “Norbornadiene-Quadricyclane System in the Photochemical Conversion and Storage of Solar Energy,” Ind. Eng. Chem. Prod. Res. Dev., 22, 627

    , 1983

Books

  1. D. J. Economou,

    “Computational Modeling in Semiconductor Manufacturing,” AIChE Journal (book review)

    , 1996

Editorials / Edited Volumes

  1. M. Meyyappan, D. J. Economou, and S. W. Butler, eds.,

    Proceedings of the 2nd International Symposium on Control, Diagnostics, and Modeling in Semiconductor Manufacturing, The Electrochemical Society Inc., Vol. 97-9

    , 1997
  2. M. Meyyappan, D. J. Economou, and S. W. Butler, eds.,

    Proceedings of the 1st International Symposium on Control, Diagnostics, and Modeling in Semiconductor Manufacturing, The Electrochemical Society Inc., Vol. 95-2

    , 1995
  3. R. C. Alkire, N. Masuko, Y. Ito, D. R. Sadoway, and D. J. Economou, eds.,

    Proceedings of the 2nd International Symposium on Electrochemical Processing of Tailored Materials, The Electrochemical Society Inc., Vol. 93-12

    , 1993

Conference Proceedings Publications

  1. B. White, Q. Wang, D. J. Economou, P. J. Wolf, T. Jacobs, and J. Fourcher,

    “Neutral oxygen beam stripping of photoresist on porous ultra low-k materials,” in Proceedings of the IEEE International Interconnect Technology Conference, June 2-4, 2003 San Francisco, p. 153

    , 2003
  2. * D. Kim and D. J. Economou,

    “Multidimensional Plasma Sheaths and Resulting Ion/Fast Neutral Distributions at the Substrate Surface,” in Proceedings of the Seventh International Symposium on Sputtering and Plasma Processes, ISSP 2003, pp. 55-62, Kanazawa, Ishikawa, Japan

    , 2003
  3. * Badri Ramamurthi and Demetre J. Economou,

    “Two-Dimensional Simulation of Pulsed power Electronegative Plasmas,” in Proceedings of the Symposium Fundamental Gas-Phase and Surface Chemistry in Vapor-Phase Deposition II, and Process Control, Diagnostics and Modeling in Semiconductor Manufacturing IV, edited by M. T. Swihart, M. D. Allendorf and M. Meyyappan, The Electrochemical Society, vol. PV 2001-13, pp. 405-414

    , 2001
  4. * Chang-Koo Kim and Demetre J. Economou,

    “Energy and Angular Distribution of Ions Extracted from a Large Hole in Contact with a High Density Plasma,” in Proceedings of the Symposium Fundamental Gas-Phase and Surface Chemistry in Vapor-Phase Deposition II, and Process Control, Diagnostics and Modeling in Semiconductor Manufacturing IV, edited by M. T. Swihart, M. D. Allendorf and M. Meyyappan, The Electrochemical Society, vol. PV 2001-13, pp. 308-315

    , 2001
  5. * D. J. Economou,

    “Multiscale Modeling in Plasma Engineering and Parallels to Electrochemical Engineering,” in Tutorials in Electrochemical Engineering-Mathematical Modeling, Electrochemical Society Proceedings Volume, R. F. Savinell, editor

    , 1999
  6. * V. Midha and D.J. Economou,

    “Effect of Geometry on CVI with RF Heating", Ceramic Engineering and Science Proceedings, 19(3-4)

    , 1998
  7. * J. Feldsien and D. J. Economou,

    “Parametric Investigation of Plasma Uniformity in a Dome-Shaped Inductively Coupled Plasma Reactor,” in Proceedings of the 2nd International Symposium on Control, Diagnostics, and Modeling in Semiconductor Manufacturing, M. Meyyappan, D. J. Economou, and S. W. Butler, eds., The Electrochemical Society Inc., Vol. 97-9, pp. 260-267

    , 1997
  8. * V. Midha and D. J. Economou,

    “A Two-Dimensional Model of Chemical Vapor Infiltration with Radio Frequency Heating,” in Proceedings of the Fourteenth International Conference on Chemical Vapor Deposition and EUROCVD-11, Paris, France, edited by M. D. Allendorf and C. Bernard, The Electrochemical Society Proceedings Volume PV 97-25, pp. 528-535

    , 1997
  9. D. J. Economou,

    “Direct Simulation Monte Carlo (DSMC) of Low Pressure Plasma Reactors,” in Proceedings of the International Symposium on Plasma and Fluid Simulation for Materials Processing, edited by K. Nanbu, Vol. 10, pp. 83-90, published by the Institute of Fluid Science, Tohoku University, Sendai, Japan

    , 1997
  10. D. J. Economou and T. Bartel,

    “Direct Simulation Monte Carlo (DSMC) of Semiconductor Manufacturing Processes,” in Proceedings of the 11th Plasma Processing Symposium, edited by G. S. Mathad, M. Meyyappan, and D. W. Hess, The Electrochemical Society, PV-96-12, 70-82

    , 1996
  11. D. J. Economou, D. M. Hoffman, S. P. Rangarajan, S. D. Athavale, J.-R. Liu, Z. Zheng, and W.-K. Chu,

    “Chemical Vapor Deposition of Aluminum and Gallium Nitride Thin Films from Metalorganic Precursors,” in Proceedings of the Symposium on III-V Nitride Materials and Processes, edited by T. Moustakas and J. P. Dismukes, and S.J. Pearton, The Electrochemical Society Inc., Vol. 96-11, p. 69

    , 1996
  12. J. Johannes, T. Bartel, D. J. Economou, G. Hebner, R. Wise, and J. Woodworth,

    “Direct Simulation Monte Carlo of Inductively Coupled Plasma and Comparison with Experiments,” in Proceedings of the 11th Plasma Processing Symposium, edited by G. S. Mathad, M. Meyyappan, and D. W. Hess, The Electrochemical Society, PV-96-12, 20-38

    , 1996
  13. R. S. Wise, D. P. Lymberopoulos and D. J. Economou,

    “A TCAD Simulation Tool for Inductively Coupled Plasma Reactors and Comparison with Experiments,” in Proceedings of the 11th Plasma Processing Symposium, edited by G. S. Mathad, M. Meyyappan, and D. W. Hess, The Electrochemical Society, PV-96-12, 11-19

    , 1996
  14. * D. P. Lymberopoulos R. Wise, and D. J. Economou,

    Modeling and Simulation of Two-Dimensional Reactive Plasma Flow in Inductively Coupled Reactors, in Proceedings of the 1st International Symposium on Control, Diagnostics, and Modeling in Semiconductor Manufacturing, M. Meyyappan, D. J. Economou, and S. W. Butler, eds., The Electrochemical Society Inc., Vol. 95-2, pp. 588-595

    , 1995
  15. C. R. Koemtzopoulos, D. J. Economou, and R. Pollard,

    “Influence of Substrate Placement on Plasma-Assisted Chemical Vapor Deposition of Diamond,” in The Synthesis and Processing of Electronic Materials, Topical Conference Preprints, AIChE Conference, San Francisco, CA

    , 1994
  16. D. P. Lymberopoulos and D. J. Economou,

    Modeling and Simulation of Inductively Coupled High Density Plasma Sources, in Proceedings of the 10th Plasma Processing Symposium, edited by G. S. Mathad and D. W. Hess, The Electrochemical Society, Vol. 94-20, pp. 1-12

    , 1994
  17. D. J. Economou,

    “Developments in Wet Etching and Deposition for Pattern Delineation,” in Trends in Electrochemistry, Council of Scientific Research Integration

    , 1993
  18. D. J. Economou,

    “Modeling Potential Distribution, Transport and Reaction in Gas Plasmas,” in Proc. of the 2nd International Symp. on Electrochemical Processing of Tailored Materials, R. C. Alkire, N. Masuko, Y. Ito, D. R. Sadoway, and D. J. Economou, eds., The Electrochemical Society Inc., 93-12, 1

    , 1993
  19. D. J. Economou and D. P. Lymberopoulos,

    “Self-Consistent Simulation of RF Glow Discharges Coupled with Neutral Transport and Reaction,” in Proc. 3rd International Symp. on Process Phys. and Modeling in Semicond. Technol., G. R. Srinivasan, K. Taniguchi, and C. S. Murthy, eds., The Electrochemical Society Inc., 93-6

    , 1993
  20. S. Deshmukh, S. Athavale and D. J. Economou,

    “Radical Beam Etching: Application to Patterning of YBa2Cu3O6+x High Tc Superconducting Thin Films,” in Proc. of International Symp. on Highly Selective Dry Etching and Damage Control, G. S. Mathad and Y. Horiike, eds., The Electrochemical Society Inc., 93-21, 235

    , 1993
  21. E. S. Aydil and D. J. Economou,

    “Modeling of Plasma Etching Reactors Including Wafer Heating Effects,” in Proc. 9th Plasma Process. Symp., The Electrochemical Society Inc., edited by G. S. Mathad and D. W. Hess, 92-18, 22

    , 1992
  22. D. Economou and S.-K. Park,

    “Modeling and Analysis of Pulsed Plasma CVD and Etching Reactors,” in Proc. 8th Plasma Process. Symp., The Electrochemical Society Inc., edited by G. S. Mathad and D. W. Hess, 90-14, 185

    , 1990
  23. E. Aydil and D. Economou,

    “Experimental and Modeling Studies of Chlorine RF Glow Discharges,” in Proc. 8th Plasma Process. Symp., The Electrochemical Society Inc., edited by G. S. Mathad and D. W. Hess, 90-14, 77

    , 1990
  24. G. Barna, J. Spatafora, E. Aydil, and D. Economou,

    “Spectroscopic Measurement of Etchant Concentration Profiles in a Parallel Plate Plasma Reactor,” in Proceedings of the Society of Manufacturing Engineers, MS90-476, pp. 1-12

    , 1990
  25. J. Wosik, T. Robin, M. Davis, J. C. Wolfe, K. Foster, S. Deshmukh, A. Bensaoula, R. Sega, D. Economou, and A. Ignatiev,

    “Dependence of Millimeter Wave Surface Resistance on the Deposition Parameters of Laser Ablated Y1Ba2Cu3Ox Thin Films,” p. 539 in Proceedings of the 2nd Conference on the Science and Technology of Thin Film Superconductors, Denver, Co

    , 1990
  26. D. Economou, S.-K. Park, and G. Williams,

    “Parallel Plate Plasma Etching Reactor Modeling: Uniformity of Etching,” in Proc. of the 7th Plasma Process. Symp., The Electrochemical Society Inc., edited by G. S. Mathad, G. C. Schwartz, and D. W. Hess, 88-22, 17

    , 1988
  27. D. Economou and R. Alkire,

    In Proceedings of the Advances in the Chlor-Alkali and Chlorate Industry, The Electrochemical Society Inc.

    , 1985
  28. D. Economou and R. Alkire,

    In Proceedings of the 5th Symposium on Plasma Processing, The Electrochemical Society Inc.

    , 1985

Patents

  1. “Atomic Layer Etching with Pulsed Plasmas,” Patent Applied for, December 15, 2010, with V. M. Donnelly.
    12/15/2010
  2. U.S. Patent #4,859,277 “Method for Measuring Plasma Properties in Semiconductor Processing,” with G. Barna.
  3. U.S. Patent #7,358,484 “Hyperthermal Neutral Beam Source and Method for Operating,” with L. Chen and V. Donnelly.
  4. U.S. Patent #7,883,839 “Method and Apparatus for Nanopantography,” with V. Donnelly, P. Ruchhoeft, L. Xu; S. C. Vemula; and M. Jain.